化学机械干式研磨的转化率建模及优化试验(4)
【作者】网站采编
【关键词】
【摘要】(3)正交试验是快速确定化学机械干式研磨加工工艺参数(载荷和转速)、磨具制作参数(磨料粒径和磨料含量)的有效方法。转化率的提高意味着单位时间内工
(3)正交试验是快速确定化学机械干式研磨加工工艺参数(载荷和转速)、磨具制作参数(磨料粒径和磨料含量)的有效方法。转化率的提高意味着单位时间内工件表层材料与磨料反应生成的可被磨料快速去除的产物增多,下一步将应用本文所建模型定量提高转化率,进而由转化率的提高来促进去除率的增加。
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文章来源:《金刚石与磨料磨具工程》 网址: http://www.jgsymlmjgc.cn/qikandaodu/2021/0708/470.html
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